| 
														 
														Model  | 
														
														 
														
														
														吸着圧力( 
														MPA )は  | 
														
														 
														purity   nitrogen( % )  | 
														
														 
														nitrogen yield 
														
														(M3/ Ton 
														.H ) 
														   | 
														
														 
														Air/N2  | 
										
| 
														 
														
														CMS-220  | 
														
														 
														0.8  | 
														
														 
														
														99.99  | 
														
														 
														
														90  | 
														
														 
														
														5.2  | 
										
| 
														 
														99.9  | 
														
														 
														150  | 
														
														 
														3.85  | 
										||
| 
														 
														99.5  | 
														
														 
														220  | 
														
														 
														2.75  | 
										||
| 
														 
														99  | 
														
														 
														260  | 
														
														 
														2.55  | 
										||
| 
														 
														
														CMS-F  | 
														
														 
														0.8  | 
														
														 
														
														99.99  | 
														
														 
														
														
														 105  | 
														
														 
														
														4.6  | 
										
| 
														 
														99.9  | 
														
														 
														160  | 
														
														 
														3.5--3.7  | 
										||
| 
														 
														99.5  | 
														
														 
														235  | 
														
														 
														2,6  | 
										||
| 
														 
														
														CMS-H  | 
														
														 
														0.8  | 
														
														 
														
														99.999  | 
														
														 
														
														66  | 
														
														 
														
														6.2  | 
										
| 
														 
														99.99  | 
														
														 
														115  | 
														
														 
														4.5  | 
										||
| 
														 
														99.99  | 
														
														 
														115  | 
														
														 
														4.5  | 
										||
| 
														 
														99.9  | 
														
														 
														173  | 
														
														 
														3.5  | 
										||
| 
														 
														99.5  | 
														
														 
														260  | 
														
														 
														2.5  | 
										||
| 
														 
														
														CMS-R  | 
														
														 
														0.8  | 
														
														 
														
														99.999  | 
														
														 
														
														70---75  | 
														
														 
														
														6.0----6.1  | 
										
| 
														 
														99.99  | 
														
														 
														125  | 
														
														 
														4.3  | 
										||
| 
														 
														99.9  | 
														
														 
														185  | 
														
														 
														3.4  | 
										||
| 
														 
														99.5  | 
														
														 
														270  | 
														
														 
														2.40--2.6  | 
										||
| 
														 
														
														CMS-E  | 
														
														 
														0.8  | 
														
														 
														
														99.999  | 
														
														 
														
														75---80  | 
														
														 
														
														5.8---6.1  | 
										
| 
														 
														99.99  | 
														
														 
														140  | 
														
														 
														4.1  | 
										||
| 
														 
														99.9  | 
														
														 
														200  | 
														
														 
														3.2--3.40  | 
										||
| 
														 
														99.5  | 
														
														 
														290  | 
														
														 
														2.5  | 
										||
| CMS-330 | 0.8 | 
														
														99.999 | 
														95 | 
														 6.4  | 
										
| 
														99.99 | 
														165 | 
														 
														4.1  | 
										||
| 
														99.9 | 
														
														 250  | 
														
														 
														3.40  | 
										||
| 
														99.5 | 
														
														 330  | 
														
														 
														2.5  |